Technical Data Sheet

Product Name 1,1,1,3,3,3 - HEXAMETHYLDISILAZANE 98%
CAS Number 999-97-3
Molecular Formula C6H19NSi2
Catalogue No. AL2326A
Molecular Weight 161.39 g/mol
Grade Assay/Purity Specification Melting/Boiling Point Moisture/LOD Residue on Ignition Related Substances Solubility
98% ≥ 98% 100 °C ≤ 0.5% ≤ 0.1% None detected Soluble in organic solvents
ISO Certifications